【产品编号】
【产品名称】Thermal vacuum test
性能指标
- Vacuum chamber volume:Φ500X500mm ultimate vacuum:Better than 5X10-3Pa within 4 hours pumpdown time :8X10-3Pa<40min (No-load, cold and clean) Leakage rate:less-than 5X10-6Pa M3 /s maximum temperature :100℃ minimum refrigeration temperature:-30℃
功能特性